PRESSURE SENSING ELEMENT AND METHOD OF MANUFACTURE THEREOF
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United States of America
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Issued Date -
Mar 6, 2025
app pub date -
Sep 5, 2024
filing date -
Sep 5, 2024
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Abstract
A pressure sensing element (100) for a pressure sensor device comprises a substrate portion (102) comprising a cavity (104) formed therein, a mouth (184) of the cavity (104) having an opening periphery (186). A membrane layer (106) overlies the opening periphery (186) of the cavity (104), and a strain gauge element (166, 168, 170, 172) is disposed on the membrane layer (106) over the cavity (104). The cavity (104) comprises a primary cavity (118) and a first annex (120) integrally formed with the primary cavity (118).
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