METHODS AND MECHANISMS FOR VIBRATION MONITORING

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20250079207A1
SERIAL NO

18242886

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Abstract

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An electronic device manufacturing system is provided that includes a monitoring system coupled to a tool. The monitoring system comprises a body to mount to a surface of a tool; a vibration detecting sensor disposed in or on the body, the vibration detecting sensor to generate a signal based on a vibration of the surface; a wired communication device disposed in or on the body, wherein in a first configuration the wired communication device is to transmit the signal generated by the vibration detecting sensor to the computer system via a wired connection with the computer system; and a wireless communication device disposed in or on the body, wherein in a second configuration the wireless communication device is to establish a wireless connection with the computer system and to transmit the signal generated by the vibration detecting sensor to the computer system via the wireless connection.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Panda, Punyabrahma Bangalore, IN 2 0
Saravanavel, Ganapathy Madurai, IN 2 0
Wang, Zhi Redwood City, US 282 3398
Zhang, Tao San Ramon, US 1018 9317

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