DUAL RESONATOR STRUCTURE FOR OVEN-CONTROLLED MEMS OSCILLATORS, INCLUDING RELATED APPARATUSES

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20250080050A1
SERIAL NO

18818810

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Abstract

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An apparatus comprises a microelectromechanical system (MEMS) including a semiconductor body. The semiconductor body comprises a first resonator, a second resonator, a supporting portion, and one or more heating elements of a heater. The first resonator is to resonate at a first resonating frequency that is generally frequency-stable over a predetermined temperature range. The second resonator is to resonate at a second resonating frequency that is generally linearly decreasing or increasing as temperature increases over the predetermined temperature range. The supporting portion is to support both the first resonator and the second resonator. The one or more heating elements of the heater are on, or in, the supporting portion.

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Patent Owner(s)

Patent OwnerAddress
MICROCHIP TECH INCARIZONA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lee, Seungbae San Jose, US 31 662

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