BULK ACOUSTIC WAVE RESONATOR, MANUFACTURING METHOD THEREOF AND ELECTRONIC DEVICE
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United States of America
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Issued Date -
Mar 13, 2025
app pub date -
Aug 29, 2022
filing date -
Aug 29, 2022
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Abstract
A bulk acoustic wave resonator, a method for manufacturing a bulk acoustic wave resonator and an electronic device are provided, and belongs to the field of communication technology. The bulk acoustic wave resonator includes: a first base substrate, a first electrode, a piezoelectric layer, and a second electrode; the first electrode is on the first base substrate; the piezoelectric layer is on a side of the first electrode away from the first base substrate; the second electrode is on a side of the piezoelectric layer away from the first electrode; a functional layer is formed on a side of the piezoelectric layer close to the first base substrate and/or on a side of the piezoelectric layer away from the first base substrate; the functional layer is made of a conductive material, and the functional layer is configured to suppress a temperature drift of the bulk acoustic wave resonator.
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