RESONATOR, RESONATOR ASSEMBLY, FILTER, ELECTRONIC DEVICE AND METHOD FOR MANUFACTURING RESONATOR
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United States of America
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Issued Date -
Mar 13, 2025
app pub date -
Nov 30, 2022
filing date -
Nov 30, 2022
priority date (Note) -
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Abstract
A resonator, a resonator assembly, a filter, an electronic device, and a method for manufacturing the resonator. The resonator comprises: a substrate, comprising a first surface and a second surface opposite to each other; a first electrode, located on the first surface, where the first electrode comprises a first protruding portion protruding away from the first surface and a first flat portion attached on the first surface, and a cavity is formed between the first protruding portion and the first surface; a piezoelectric layer, located at a side of the first electrode away from the substrate, where the piezoelectric layer extends in parallel with the first surface; and a second electrode, located at a side of the piezoelectric layer away from the first electrode.
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