LINE-ILLUMINATION TEMPORAL FOCUSING 3D NANO-FABRICATION APPARATUS AND METHOD
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United States of America
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Mar 20, 2025
app pub date -
Sep 14, 2023
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Sep 14, 2023
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Abstract
The present invention teaches an apparatus and method for line-illumination temporal focusing three-dimensional (3D) nano-fabrication, the apparatus and method comprising: a laser source (110) configured to emit a laser beam (111); a line-illumination pattern unit (150) forming a pre-determined line pattern from a line-shaped beam; a data acquisition unit (120) receiving input and transmitting output signals for movement synchronization of multiple devices; an optical imaging device (130) configured to monitor fabrication process in real time; a controller unit (140); and a substrate plane (170).
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