SHOWERHEAD FOR PROCESS TOOL
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United States of America
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Issued Date -
Mar 20, 2025
app pub date -
Nov 27, 2024
filing date -
Nov 27, 2024
priority date (Note) -
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status (Latency Note)
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Abstract
In one example, an apparatus includes a processing chamber; a substrate holder disposed in the processing chamber; and a showerhead disposed over the substrate holder. The showerhead includes a first zone disposed in a central region of the showerhead, the first zone including a first cavity, a plurality of first fluid exit holes aligned to output a fluid from the first cavity towards the substrate holder, a first flow path fluidly coupled to a fluid source, and a plurality of first fluid distribution pathways fluidly coupling the first flow path with the first cavity.
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