SENSORS FOR SEMICONDUCTOR PROCESSING TOOLS
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United States of America
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Issued Date -
Mar 20, 2025
app pub date -
Feb 20, 2023
filing date -
Feb 20, 2023
priority date (Note) -
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Abstract
Described herein is a pedestal assembly comprising a platen and a sensor support plate below the platen. In at least one implementation, sensor support plate comprises a sensor compartment and a waveguide temperature sensor within the sensor compartment. In at least one implementation, waveguide temperature sensor comprises a temperature sensor comprising a first reflector structure and a second reflector structure. In at least one implementation, first reflector structure and second reflector structure are separated by a gauge length.
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