Microacoustic Filter with an Acoustically-Decoupled Electrode Structure
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United States of America
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Mar 20, 2025
app pub date -
Sep 19, 2023
filing date -
Sep 19, 2023
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Abstract
An apparatus is disclosed for implementing a microacoustic filter with an acoustically-decoupled electrode structure. In an example aspect, the apparatus includes the microacoustic filter with a piezoelectric layer, a substrate, and an electrode structure. The piezoelectric layer has a crystalline structure operative to laterally excite a plate mode. The electrode structure is positioned between the piezoelectric layer and the substrate and has a has a first surface that faces the piezoelectric layer. The microacoustic filter also includes at least one spacer extending from the substrate past a plane defined by the first surface of the electrode structure and towards the piezoelectric layer to form a cavity between the electrode structure and the piezoelectric layer.
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