Importance

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Abstract

An optical waveguide device includes a substrate, an optical waveguide of a rib type formed on the substrate, and modulation electrodes disposed on the substrate to interpose the optical waveguide of the rib type, in which the modulation electrodes include a plurality of segment electrodes disposed in proximity to the optical waveguide of the rib type and disposed along the optical waveguide of the rib type, and a signal transmission portion electrically connected to the segment electrode and transmitting a modulation signal, a thickness of the signal transmission portion is larger than a thickness of the segment electrode, a buffer layer is disposed between the signal transmission portion and the optical waveguide of the rib type in at least a portion where the signal transmission portion crosses the optical waveguide of the rib type, and no buffer layer is disposed between the substrate and the segment electrode.

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First Claim