Importance

Loading Importance Indicators...

Abstract

A substrate transporting device includes the following elements. A substrate transporting device includes a transporting unit having a holding hand that holds the substrate, and being configured to transport the substrate by advancing/retreating the holding hand from the carry-in/out port of the accommodating container to a gap between the substrates; a thickness shape information collecting unit configured to collect thickness shape information based on an outer edge of the substrate for each substrate while the substrate is accommodated in the accommodating container; a calculation unit configured to calculate height information of a gap between two vertically adjacent substrates to which the holding hand advances/retreats based on the thickness shape information of the two substrates when the transporting unit carries-in/out the substrates to/from the accommodating container; and a control unit configured to control transport of the transporting unit based on the height information.

Loading the Abstract Image...

First Claim