Importance

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Abstract

A substrate transfer apparatus including the control unit is configured to advance the sensor holding member between a first substrate that is a substrate to be transferred and a second substrate that is on a lower side of the first substrate, and to measure a minimum distance between the substrates, based on a sum of a first minimum distance and a second minimum distance, the first minimum distance being a distance with respect to the substrate at a first measurement point where the first sensor is closest to the first substrate, and the second minimum distance being a distance with respect to the substrate at a second measurement point where the second sensor is closest to the second substrate, and to adjust a height at which the hand is advanced, based on the minimum distance between the substrates so that a distance between the hand and the first substrate and a distance between the hand and the second substrate both become equal to or more than a predetermined distance, when the hand is advanced between the first substrate and the second substrate.

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First Claim