Importance

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Abstract

A semiconductor device includes: a semiconductor substrate having an active region and an outer peripheral region in which a voltage withstanding structure is formed to surround the active region; a temperature sensor configured to detect a temperature of the semiconductor substrate in the outer peripheral region; and a conductive spacer disposed on the active region. The temperature sensor is positioned not to overlap the conductive spacer in the thickness direction. The temperature sensor is positioned closer to a center of the semiconductor substrate in an orthogonal direction perpendicular to the thickness direction than the voltage withstanding structure is.

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First Claim