METHOD OF PROCESSING WAFER

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United States of America Patent

APP PUB NO 20250105167A1
SERIAL NO

18887709

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method is of processing a wafer that includes on a side of a front surface a plurality of intersecting planned dividing lines and a plurality of devices formed in respective areas defined by the planned dividing lines, and a metal layer laminated on a side of a back surface. The method includes: forming a mark indicating positions of the planned dividing lines of the wafer on the back surface; and dicing the wafer from the side of the back surface using the formed mark as a reference to divide the wafer into individual chips.

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Patent Owner(s)

Patent OwnerAddress
DISCO CORPORATIONTOKYO

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
KUBO, Atsushi Tokyo, JP 91 657
YAMAMOTO, Naoko Tokyo, JP 53 519

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