APPARATUS FOR CORRECTING ASTIGMATISM OF A LASER BEAM

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20250105577A1
SERIAL NO

18976404

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

An apparatus for transmitting and/or reflecting a laser beam for at least partially correcting astigmatism of the laser beam includes an optical element for transmitting and/or reflecting the laser beam. The optical element is deformable by an external force. The apparatus further includes at least four supports for the optical element arranged along an imaginary circle. The at least four supports are aligned diametrically opposite one another in pairs. The apparatus further includes at least two deformation elements for exerting the external force on the optical element. The at least two deformation elements are arranged diametrically to one another with respect to a center of the imaginary circle through the at least four supports. Each of the at least two deformation elements is arranged on an angle bisector of an angle defined by two adjacent supports and the center of the imaginary circle through the at least four supports.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING GMBHJOHANN-MAUS-STRASSE 2 DITZINGEN 71254

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ergin, Tolga Bietigheim-Bissingen, DE 6 12
Hopf, Andreas Möglingen, DE 11 15
Lambert, Martin Korb, DE 30 134
Schlosser, Oliver Filderstadt, DE 3 0
Wägerle, Jens Kirchheim, DE 1 0

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation