Importance

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Abstract

According to one embodiment of the present disclosure, a wafer storage container cleaning apparatus includes a cleaning chamber that cleans a wafer storage container including a shell including an opening on one surface and a gripped portion on another surface crossing the one surface with the opening, and a door detachable from the opening; and a transfer robot including a robot hand that individually grips the shell and the door. The robot hand includes a shell gripping portion including a pair of first gripping claws that are movable toward and away from each other along a first straight line; and a door gripping portion including a pair of second gripping claws movable toward and away from each other along a second straight line intersecting the first straight line in a top view. The cleaning chamber cleans the shell with the opening facing downward.

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First Claim