ROTATION SPEED CALCULATION APPARATUS, ROTATION SPEED CALCULATION METHOD, SUBSTRATE CLEANING APPARATUS, AND SUBSTRATE PROCESSING APPARATUS
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United States of America
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Issued Date -
Apr 3, 2025
app pub date -
Sep 24, 2024
filing date -
Sep 24, 2024
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Abstract
Provided is a rotation speed calculation apparatus including: a first vibration sensor configured to detect a vibration generated when a notch in a peripheral edge portion of a substrate to be cleaned hits a roller holding the peripheral edge portion of the substrate when the substrate is rotated by driving the roller to rotate; a second vibration sensor configured to detect a vibration of a housing defining a space in which the substrate is cleaned; and a rotation speed calculator configured to calculate a rotation speed of the substrate based on the vibration detected by the first vibration sensor and the vibration detected by the second vibration sensor.
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