INHIBITOR COMPOUNDS FOR SELECTIVE PASSIVATION OF SURFACES
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United States of America
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Apr 3, 2025
app pub date -
Sep 27, 2024
filing date -
Sep 27, 2024
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Abstract
Methods for selective passivation for metals and related systems and related methods are provided. A method comprises one or more of the following steps: exposing a substrate to an inhibitor compound to form a first layer on a metal surface of the substrate, wherein the inhibitor compound comprises an alkyne compound functionalized with at least one alkoxy group; and exposing the substrate to a precursor vapor to form a second layer on a non-metal surface of the substrate. Other methods and systems are provided herein.
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