METHOD AND APPARATUS FOR DIAMETER MEASUREMENT OF CZOCHRALSKI MONOCRYSTALLINE SILICON, AND DEVICE FOR GROWING CZOCHRALSKI MONOCRYSTALLINE SILICON
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United States of America
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Apr 3, 2025
app pub date -
Sep 24, 2024
filing date -
Sep 24, 2024
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Abstract
The present application provides a method and an apparatus for measuring ingot diameter, and a device for growing the ingot. The method comprises controlling a first calibration light source and a second calibration light source to emit light; obtaining coordinates of the calibration light sources; obtaining a diameter measurement coefficient based on the coordinates; obtaining diameter coordinates of two ends of the ingot diameter; and obtaining a measured value of the diameter based on the diameter coordinates and the diameter measurement coefficient. Accordingly, the measurement error of the ingot diameter can be reduced, and the accuracy of ingot diameter control during the growth process can be improved, thereby the production efficiency of Czochralski silicon ingot can be increased.
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