METHOD FOR MANUFACTURING FREE-STANDING SINGLE-CRYSTAL MEMBRANE HAVING PEROVSKITE STRUCTURE, AND METHOD FOR TRANSFERRING FREE-STANDING SINGLE-CRYSTAL MEMBRANE HAVING PEROVSKITE STRUCTURE
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United States of America
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Apr 3, 2025
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Mar 8, 2022
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Mar 8, 2022
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Abstract
The present invention provides a method for manufacturing a free-standing single-crystal membrane having a perovskite structure, the method comprising: applying an oxygen-deficient perovskite sacrificial layer having an ACuO2 structure (where A is at least one selected from the group consisting of calcium (Ca), strontium (Sr), and barium (Ba)) on a substrate; epitaxially growing a single-crystal membrane having a perovskite structure on the sacrificial layer; and selectively removing the sacrificial layer using an etchant, and provides a method for transferring a free-standing single-crystal membrane having a perovskite structure by using the method for manufacturing a free-standing single-crystal membrane having a perovskite structure.
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