INTEGRATED OPTICAL PHASE SHIFTER USING BURIED ELECTRODES
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United States of America
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Apr 3, 2025
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Sep 30, 2024
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Sep 30, 2024
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Abstract
Exemplary embodiments include buried electrodes that allow for bottom electrode integration with photonic devices, while retaining the ability to perform the high-temperature processing steps used in low-loss photonic elements. In addition to functionality in the case of buried heaters for thermal tuning of devices, the same or similar techniques can be applied to other tuning mechanisms, based on the electro-optical effect and (piezoelectrically-mediated) stress-optical effect.
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