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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
TOKYO ELECTRON LIMITED	3-1 AKASAKA 5-CHOME MINATO-KU TOKYO 1076325 ?1076325

International Classification(s)

• H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....
• H04N:PICTORIAL COMMUNICATION, e.g. TELEVISION
• G03B:APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS O....
• G02F:DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF ....
• G03F:PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNE....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
HAYAMA, Takafumi	Koshi City, JP	15	82
IIDA, Shigeyuki	Sapporo City, JP	2	3
INTO, Shunsuke	Koshi City, JP	1	0
ISHIMARU, Daisuke	Koshi City, JP	10	28
KUNUGIMOTO, Yuichiro	Koshi City, JP	14	12
MATSUTAKE, Yuki	Koshi City, JP	2	0
MIZUSHINO, Shinichi	Koshi City, JP	5	3
TOYOZAWA, Akihiro	Koshi City, JP	4	8

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
3.5 Year Payment	$1600.00	$800.00	$400.00	Oct 3, 2028
7.5 Year Payment	$3600.00	$1800.00	$900.00	Oct 3, 2032
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Oct 3, 2036

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 3.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 7.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2025/0112,066

LIQUID PROCESSING APPARATUS, AND MONITORING METHOD

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