WINDOW-MOUNTED POLISHING PAD AND METHOD OF MANUFACTURING THE SAME
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United States of America
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Issued Date -
Apr 10, 2025
app pub date -
Aug 11, 2022
filing date -
Aug 11, 2022
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Abstract
Disclosed are window-mounted polishing pad. Since thermal fusion method and vibration fusion method are not applied while window is inserted into and attached to polishing pad, polishing pad is not deformed and polishing slurry does not leak through a gap between window and the polishing pad. A method of manufacturing the window-mounted polishing pad is also disclosed. The window-mounted polishing pad includes: polishing layer in which first punched hole is formed in thickness direction; window that is inserted into and fixed to the first punched hole of polishing layer; lower support layer; adhesive layer that mediates bonding of polishing layer and lower support layer; a sealing adhesive member positioned between the window and adhesive layer.
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