HORIZONTAL PRE-CLEAN 2-STAGE DOWNFORCE MECHANISM WITH FLEXURE
Number of patents in Portfolio can not be more than 2000
United States of America
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Issued Date -
Apr 10, 2025
app pub date -
Oct 10, 2023
filing date -
Oct 10, 2023
priority date (Note) -
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status (Latency Note)
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Abstract
Exemplary chemical mechanical cleaning systems may include a carrier head. The systems may include a motor that is coupled with the carrier head. The motor may be operable to rotate the carrier head about a central axis of the carrier head. The systems may include a two-stage downforce actuator that is operable to vertically translate the carrier head and the motor between a raised position and a cleaning position. The downforce actuator may include a first stage that includes a linear actuator that is operable to vertically translate the carrier head between the raised position and at least an upper 50% of a vertical travel distance between the raised and cleaning positions. The downforce actuator may include a second stage that includes an expandable flexure that is operable to vertically translate the carrier head between the cleaning position and no greater than a lower 50% of the vertical distance.
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