HIGH PERFORMANCE CMP MULTIDISK APPARATUS
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United States of America
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Issued Date -
Apr 10, 2025
app pub date -
Oct 9, 2023
filing date -
Oct 9, 2023
priority date (Note) -
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status (Latency Note)
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Abstract
A system may include a gimbal defining a plurality of pockets, where each pocket may include a first portion and a second portion that extends between the first portion and a base of the pocket. The second portion may have a greater diameter than the first portion. The system may include a plurality of conditioning disks, where each conditioning disk is seated within the first portion of a respective pocket. The system may include a plurality of gaskets, where each gasket is seated within the second portion of a respective pocket. The system may include a plurality o-rings, each o-ring disposed between a peripheral edge of one of the plurality of conditioning disks and a lateral wall of one of the plurality of pockets. The system may include a plurality of shoulder screws for coupling the gimbal with one of the plurality of gaskets and a conditioning disk.
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