ELECTROPLATING CHAMBER USING JET ARRAY TO ENABLE HIGH MASS-TRANSFER

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20250116028A1
SERIAL NO

18483957

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Exemplary electroplating systems may include a vessel. The systems may include a head that is configured to hold a substrate. The head may be positionable within an interior of the vessel. The systems may include a spray jet array disposed within the interior of the vessel. The spray jet array may include a plate defining a plurality of apertures through a thickness of the plate. The systems may include at least one fluid pump that is fluidly coupled with an inlet end of each of the plurality of apertures.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bergman, Eric J Kalispell, US 97 1991
Hanson, Kyle M Kalispell, US 157 2514
Harris, Randy A Kalispell, US 29 575
Klocke, John L Kalispell, US 47 163
McHugh, Paul R Kalispell, US 119 1734
Wilson, Gregory J Kalispell, US 146 1759
Ypma, Keith Edward Kalispell, US 5 0
Zimmerman, Nolan L Kalispell, US 13 29

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation