MODEL-BASED ACOUSTO-OPTIC DEPTH-METROLOGY OF SPECIMENS

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20250116597A1
SERIAL NO

18377431

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Abstract

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Disclosed herein is a method for non-destructive depth-profiling including projecting a pulsed pump beam into a specimen, projecting a pulsed probe beam thereinto, and sensing light returned therefrom to obtain a measured signal. Each probe pulse is configured to undergo Brillouin scattering off a primary acoustic pulse induced by the directly preceding pump pulse, so as to be scattered there off at a respective depth within the specimen. The method further includes executing an optimization algorithm configured to receive as inputs the measured signal, and/or a processed signal obtained therefrom, and output values of structural parameter(s) characterizing the specimen through minimization of a cost function indicative of a difference between the measured signal and a simulated signal obtained using a forward model simulating the scattering of a pulsed probe beam off at least the primary acoustic pulses.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS ISRAEL LTD9 OPPENHEIMER STREET REHOVOT 7670109

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Almog, Ido Rehovot, IL 16 20
Golani, Ori Kibbutz Shoval, IL 8 54
Shwartz, Guy Ramat Gan, IL 5 1

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