MICRO-ELECTROMECHANICAL SYSTEMS SWITCH WITH BEAM MOVEMENT ORTHOGONAL TO FORCE
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United States of America
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Issued Date -
Apr 10, 2025
app pub date -
Oct 10, 2023
filing date -
Oct 10, 2023
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Abstract
A micro-electromechanical systems (MEMS) switch and method of fabricating the same including at least one comb drive having a first input and a second input, at least one conductive beam connected across the at least one comb drive, a first contact, and a second contact, wherein no voltage difference between the first input and the second input does not result in any movement of the MEMS switch, and wherein a voltage difference between the first input and the second input causes an electrostatic force to be generated that causes the at least one conductive beam to move in a direction orthogonal to a direction of the electrostatic force.
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