PARTICLE BEAM SYSTEM WITH COOLING SYSTEM
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
-
N/A
Issued Date -
Apr 10, 2025
app pub date -
Oct 9, 2024
filing date -
Oct 9, 2024
priority date (Note) -
Published
status (Latency Note)
Importance
Abstract
A particle beam system comprises: an object mount for mounting an object to be examined; a particle beam source; a lens for focusing the particle beam; a detector; and a cooling system for cooling the object mount. The cooling system comprises: a coolant passage through the object mount; a supply port; an outlet; a heat exchanger having two passages; a first connecting line connected to the inlet of the coolant passage and the first passage through the heat exchanger; a second connecting line connected to the outlet of the coolant passage and the second passage through the heat exchanger; a third connecting line connected to the first passage through the heat exchanger and the supply port; a fourth connecting line connected to the second passage through the heat exchanger and the outlet; and a cooling mechanism for cooling a portion of the first connecting line.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully