VIBRATORY ACTUATOR, MOVING OBJECT HAVING THE SAME, MOVING OBJECT CONTROL SYSTEM, AND VACUUM APPARATUS
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United States of America
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N/A
Issued Date -
Apr 10, 2025
app pub date -
Oct 8, 2024
filing date -
Oct 8, 2024
priority date (Note) -
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Abstract
A vibratory actuator capable of improving the abrasion resistance to enable stable driving in a vacuum environment such as outer space or a vacuum apparatus. There is provided a vibratory actuator, wherein a contact member and a vibrating member relatively move by a vibration of the vibrating member, wherein a flat portion and a raised portion having a parietal portion and a wall portion are integrally formed on an elastic member, where each edge or an entire circumference of the parietal portion is supported by the wall portion, wherein the parietal portion is provided with a friction member, different from the elastic member, to come into contact with the contact member, wherein the friction member is a sphere or column, and wherein the friction member is supported by an inclined surface formed on the parietal portion.
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