GYROSCOPE QUADRATURE CANCELLATION
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United States of America
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Issued Date -
Apr 10, 2025
app pub date -
Oct 10, 2023
filing date -
Oct 10, 2023
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Abstract
A microelectromechanical system (MEMS) gyroscope includes a MEMS structure that outputs a capacitive signal that includes both a Coriolis signal used to determine an angular velocity and a quadrature signal 90 degrees out-of-phase with the Coriolis signal. A capacitance to voltage (C2V) amplifier receives and amplifies the capacitive signal for further processing. Quadrature cancellation circuitry processes the output of the C2V amplifier to isolate the quadrature signal and generate a signal to control variable capacitors coupled to the C2V amplifier input in a manner that removes the quadrature signal from the C2V amplifier output.
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