Apparatus for simultaneously processing a plurality of substrates
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United States of America Patent
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Jan 29, 1980
Issued Date -
N/A
app pub date -
Jun 6, 1978
filing date -
Apr 25, 1977
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An apparatus for simultaneously processing a plurality of substrates comprises at least one novel chamber wherein at least one processing step is performed. Each chamber contains a plurality of spindles each having a substrate receiving surface upon which a substrate may be placed. Each of the spindles is at a different height from the floor of the chamber. Preferably the spindles are aligned in a single row according to height. Further, the chamber is provided with means for dispensing processing materials thereinto. The apparatus further comprises means for delivering a plurality of substrates to and from the processing chamber.
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