Electrically programmable and erasable MOS floating gate memory device employing tunneling and method of fabricating same

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United States of America Patent

PATENT NO 4203158
SERIAL NO

05969819

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Abstract

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An electrically programmable and electrically erasable MOS memory device suitable for high density integrated circuit memories is disclosed. Carriers are tunneled between a floating conductive gate and a doped region in the substrate to program and erase the device. A minimum area of thin oxide (70 A-200 A) is used to separate this doped region from the floating gate. In one embodiment, a second layer of polysilicon is used to protect the thin oxide region during certain processing steps.

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Patent Owner(s)

  • INTEL CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Frohman-Bentchkowsky, Dov Haifa, IL 1 243
Johnson, William S Palo Alto, CA 25 1277
Mar, Jerry Sunnyvale, CA 2 272
Perlegos, George Cupertino, CA 12 554

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