Method for the contactless measurement of the potential waveform in an electronic component and apparatus for implementing the method
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United States of America Patent
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-
Sep 2, 1980
Grant Date -
N/A
app pub date -
Mar 21, 1979
filing date -
Mar 31, 1978
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A method for measuring the potential waveform in an electronic component by means of a scanning electron beam in which the pulse sequence of the primary electron beam contains alternatingly a pulse sequence with a fixed reference phase with respect to the potential pattern of the measuring voltage, and a pulse sequence with a measuring phase which can be shifted over a phase range, with the potential difference between the reference phase and the measuring phases measured, permitting the contactless measurement and a display of the potential pattern on a picture screen.
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