Organic sulfonic acid stripping composition and method with nitrile and fluoride metal corrosion inhibitor system
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United States of America Patent
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Sep 9, 1980
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app pub date -
Mar 9, 1979
filing date -
Mar 9, 1979
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Expired
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Abstract
Improved organic stripping compositions useful in removing polymeric organic substances, such as photoresist, from metal substrates which comprise one or more organic sulfonic acids, one or more organic solvents and, optionally phenol. The inhibitors system includes 5 to 300 ppm by weight of fluoride per weight of composition and between about 0.01 and about 5 weight percent of a nitrile compound such as acetonitrile or malononitrile.
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