Micromechanical display logic and array
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United States of America Patent
Stats
-
Oct 21, 1980
Grant Date -
N/A
app pub date -
Dec 11, 1978
filing date -
Dec 11, 1978
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A display device, addressing circuitry, and semiconductor control logic are all portions of an integrated structure formed by thin film technology on a single silicon wafer. The display comprises a thin film micromechanical electrostatic form of light reflective display formed by depositing thin films upon a silicon wafer and selectively etching to form metal-amorphous oxide micromechanical leaves deflected by applying potential thereto to provide electrostatic deflection. MOSFET devices are also formed upon the silicon wafer in juxtaposition with a plurality of micromechanical display elements. Addressing circuitry is connected to the MOSFET devices.
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