Apparatus and method for contact-free potential measurements of an electronic composition
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United States of America Patent
Stats
-
Jul 7, 1981
Grant Date -
N/A
app pub date -
Dec 21, 1979
filing date -
Jan 26, 1979
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A method and apparatus for the contact-free potential measurement at an electronic component using an electron beam wherein a predetermined potential is applied to the measuring point and the output voltage of a controlled gain amplifier is set to a predetermined reference value U.sub.S by means of controlling a photomultiplier voltage U.sub.PM and the photomultiplier voltage U.sub.PM is maintained constant. The measuring voltage U.sub.M is then determined from the difference of the voltages U.sub.R -U.sub.S between the control unit output voltage U.sub.R and the index value voltage U.sub.S. The method and apparatus allow the quantitative potential measurement to be made on the conducting paths of an integrated circuit without utilizing manual adjustments.
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