Head for high speed spinner having a vacuum chuck
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United States of America Patent
Stats
-
Jul 28, 1981
Grant Date -
N/A
app pub date -
Jun 27, 1980
filing date -
Jun 27, 1980
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A head 10 for a high-speed spinner characterized by a substantially cylindrical body adapted to be mounted at the distal end of a vertically oriented drive shaft 16 and including a vacuum chuck having an upwardly facing chamber 30 circumscribed by an annular surface 32 for receiving in supported relation a silicon chip, and an ordered array of low-pressure cavities defined about the periphery of the body and connected in communication with the chamber via radially extended bores 38 for translating low pressures to the chamber 30 as the head is angularly displaced, whereby a pressure differential is established across the chip for securing it to the head.
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