Means to orbit and rotate target wafers supported on planet member
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United States of America Patent
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-
Aug 18, 1981
Grant Date -
N/A
app pub date -
Oct 31, 1979
filing date -
Oct 31, 1979
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A vapor deposition system wherein means orbit a plurality of rotating planets. Each planet supports a plurality of wafer targets which orbit the associated planet axis. A planet wheel of limited rotatability is operative to effect rotation of the orbiting wafer targets.
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