Power transfer network
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United States of America Patent
Stats
-
Aug 18, 1981
Grant Date -
N/A
app pub date -
Sep 26, 1978
filing date -
Sep 28, 1978
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A power transfer network for efficiently coupling a source of high frequency energy to a physically large dimensioned electrode system in a sputtering machine which exhibits high spray capacitance to ground. The network includes an inductive element capable of being tapped along its length such as a linear line section and a tuning capacitor with the source of high frequency energy in the megahertz range, each of the source and the electrode system being connectively tapped into a suitable location along the inductive element.
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