Strain gage transducer and process for fabricating same
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United States of America Patent
Stats
-
Sep 8, 1981
Issued Date -
N/A
app pub date -
Sep 4, 1979
filing date -
May 18, 1978
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A transducer which includes a metal strain gage material formed on a flexible monocrystalline silicon diaphragm is disclosed. The transducer is fabricated to a large extent with semiconductor processing steps. Gold is diffused into a platinum-tungsten gage material. This allows the gage material to be chemically etched in the presence of other metals to define the active gage resistors. In the presently preferred embodiment, these resistors are formed over thin areas of the diaphragm to provide increased linearity and sensitivity.
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