Sputtering apparatus for coating elongated tubes and strips
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United States of America Patent
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-
Sep 22, 1981
Grant Date -
N/A
app pub date -
Sep 8, 1980
filing date -
Sep 8, 1980
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A conventional sputtering chamber is modified to include two elongated hollow tubes which accommodate an elongated workpiece in the form of a tube or strip, of lesser diameter, during a sputter-coating operation. During the sputtering operation, the workpiece is simultaneously rotated and moved back and forth beneath at least one sputtering target to receive a uniform coating thereon.
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Cited Art Landscape
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