Cryogenic pumping apparatus with replaceable pumping surface elements

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United States of America Patent

PATENT NO 4295338
SERIAL NO

06086107

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Abstract

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Two-stage cryogenic pumping apparatus having individual plate members with cryosorbent coatings secured by removable fasteners to permit easy assembly and replacement of the plate members. The plate members are spaced apart to provide relatively unrestricted access to the cryosorbent material for the gases to be adsorbed thereon.

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Patent Owner(s)

  • EBARA TECHNOLOGIES, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Welch, Kimo M Mountain View, CA 5 66

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