Semiconductor pressure detection device

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United States of America Patent

PATENT NO 4300395
SERIAL NO

06087938

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Abstract

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A semiconductor pressure detection device is provided which is adapted to detect pressure using resistors formed in the surface area of a semiconductor substrate and having a piezo-effect. A diode is formed in the surface area of the semiconductor substrate and a drive voltage corresponding to a temperature variation is supplied to a bridge circuit through the diode.

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Patent Owner(s)

  • TOKYO SHIBAURA DENKI KABUSHIKI KAISHA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Noda, Ryuzo Kawasaki, JP 3 35
Shirouzu, Shunji Ayase, JP 8 345

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