Sputter coating of microspherical substrates by levitation
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United States of America Patent
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-
Nov 24, 1981
Grant Date -
N/A
app pub date -
Nov 19, 1979
filing date -
Nov 19, 1979
priority date (Note) -
Expired
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Abstract
Microspheres are substantially uniformly coated with metals or nonmetals by simultaneously levitating them and sputter coating them at total chamber pressures less than 1 torr. A collimated hole structure 12 comprising a parallel array of upwardly projecting individual gas outlets 16 is machined out to form a dimple 11. Glass microballoons, which are particularly useful in laser fusion applications, can be substantially uniformly coated using the coating method and apparatus.
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