Capacitive pressure sensor
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United States of America Patent
Stats
-
Mar 30, 1982
Grant Date -
N/A
app pub date -
Oct 29, 1979
filing date -
Oct 29, 1979
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The disclosure relates to a capacitive pressure transducers which includes a flexible diaphragm. The flexibility of the diaphragm varies with temperature and thus different capacitance values result from the same pressures at different temperatures. To compensate for the variance of flexibility and capacitance values parts of the transducer are chosen with respect to specific temperature of coefficients.
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