Megasonic jet cleaner apparatus
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United States of America Patent
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-
Apr 27, 1982
Grant Date -
N/A
app pub date -
Aug 28, 1980
filing date -
Aug 28, 1980
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An apparatus for cleaning a surface of an article such as a semiconductor wafer with cleaning fluid includes a nozzle extending from a chamber for developing a jet of cleaning fluid. The fluid is pressurized and megasonic energy is applied to the fluid by a megasonic transducer. The nozzle is shaped to provide a ribbon-like jet of cleaning fluid vibrating at megasonic frequencies for impingement on the surface of the article.
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