Cryogenic pump with radiation shield

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United States of America Patent

PATENT NO 4336690
SERIAL NO

06234512

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Abstract

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Two stage cryogenic pump having axially spaced baffle members for shielding the second stage from external thermal radiation while permitting substantially unimpeded gas flow from the inlet opening to the second stage.

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Patent Owner(s)

Patent OwnerAddress
EBARA TECHNOLOGIES INCORPORATED A CORP OF CA3560 BASSETT STREET SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Welch, Kimo M Mountain View, CA 5 66

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