Importance

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Abstract

A flow regulating valve comprising a cylinder and a valve rod telescopically fitted within said cylinder, and a flow passage of small sectional area being formed therebetween so as to control flow of the fluid by adjusting depth of the fitting of the valve rod within the cylinder. The valve is capable of fine and accurate adjustment of the flow rate over a wider range than in the conventional needle valve regulator. A flow regulating valve capable of controlling flow of one direction and permit rapid flow of the opposite direction is also provided by using a check valve together. Further, a fluid feeding apparatus which is capable of feeding the fluid for a predetermined time interval is provided, by using such flow regulating valve, and a fast acting vacuum chuck device is provided by using such a fluid feeding apparatus.

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First Claim