Piezoelectric driven diaphragm micro-pump
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United States of America Patent
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-
Aug 17, 1982
Grant Date -
N/A
app pub date -
Dec 4, 1979
filing date -
Dec 4, 1979
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A piezoelectric driven variable volume having a chamber pump with a flexible tube and a non-compressible fluid therein. Solenoid operated valves are associated with the inlet and outlet of the flexible tube. A control circuit sequences the valves and the piezoelectric drive to pump small volumes of liquid through the flexible tube by a diaphragm-type action.
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